Determination of electron energy distribution functions in surface wave produced plasmas. I. Modelling

Physics & Astronomy

• surface waves 59%
• energy distribution 54%
• distribution functions 48%
• electron energy 46%
• argon plasma 36%
• maintenance 32%
• approximation 32%
• field strength 27%
• space charge 26%
• breakdown 23%
• electrons 13%

Chemical Compounds

• Surface Wave 100%
• Distribution Function 75%
• Boltzmann Equation 51%
• Space Charge 39%
• Plasma 38%
• Electron Particle 33%
• Energy 29%
• Strength 19%

Engineering & Materials Science

• Surface waves 68%
• Distribution functions 63%
• Electrons 62%
• Plasmas 56%
• Boltzmann equation 46%
• Electric space charge 41%
• Argon 34%