Effects of TMSb overpressure on InSb surface morphology for InSb epitaxial growth using low pressure metalorganic chemical vapor deposition

Sehun Park, Jinwook Jung, Chulkyun Seok, Keun Wook Shin, Sung Hyun Park, Yasushi Nanishi, Yongjo Park, Euijoon Yoon

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Engineering & Materials Science

Physics & Astronomy

Chemical Compounds