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High permittivity gate insulators TiO2 and ZrO2
B. He, N. Hoilien, R. Smith, T. Ma, C. Taylor, I. St Omer, S. A. Campbell, W. L. Gladfelter, M. Gribelyuk, D. Buchanan
Research output: Chapter in Book/Report/Conference proceeding › Chapter
5
Scopus
citations