Reliability monitoring ring oscillator structures for isolated/combined NBTI and PBTI measurement in high-k metal gate technologies

Jae Joon Kim, Barry P. Linder, Rahul M. Rao, Tae Hyoung Kim, Pong Fei Lu, Keith A. Jenkins, Chris H. Kim, Aditya Bansal, Saibal Mukhopadhyay, Ching Te Chuang

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution

19 Scopus citations

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Engineering & Materials Science