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Synthesis and characterization of Si-containing block co-polymers with resolution beyond 10 nm
Yasunobu Someya, Yusuke Asano, Michael J. Maher, Gregory Blachut, Austin P. Lane, Stephen Sirard, Christopher J. Ellison, C. Grantwillson
Research output: Contribution to journal › Article › peer-review
3
Scopus
citations