Wafer-level 3D integration technology

Steven J. Koester, Albert M. Young, Roy R. Yu, Sampath Purushothaman, Kuan Neng Chen, Douglas C. La Tulipe, Narender Rana, Leathen Shi, Matthew R. Wordeman, Edmund J. Sprogis

Research output: Contribution to journalReview articlepeer-review

154 Scopus citations

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Engineering & Materials Science